SOI-Supported Microdevice for Hydrogen Purification Using Palladium–Silver Membranes

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SOI-Supported Microdevice for Hydrogen Purification Using Palladium–Silver Membranes

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ژورنال

عنوان ژورنال: Journal of Microelectromechanical Systems

سال: 2010

ISSN: 1057-7157,1941-0158

DOI: 10.1109/jmems.2010.2041529